Issued Patents 2025
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360456 | EUV metallic resist performance enhancement via additives | Joy Cheng, Ching-Yu Chang | 2025-07-15 |
| 12354874 | Method of manufacturing semiconductor devices and pattern formation method | Chun-Chih HO, Yahru Cheng, Ching-Yu Chang | 2025-07-08 |
| 12253800 | EUV metallic resist performance enhancement via additives | Joy Cheng, Ching-Yu Chang | 2025-03-18 |
| 12249507 | Method of manufacturing a semiconductor device | Ching-Yu Chang, Chin-Hsiang Lin | 2025-03-11 |
| 12222650 | Photoresist underlayer and method of manufacturing a semiconductor device | Ching-Yu Chang | 2025-02-11 |
| 12222653 | Method for forming semiconductor structure | Ming-Hui Weng, Ching-Yu Chang, Chin-Hsiang Lin, Chen-Yu Liu | 2025-02-11 |
| 12210286 | Metal-compound-removing solvent and method in lithography | Joy Cheng, Ching-Yu Chang | 2025-01-28 |
| 12210283 | EUV photoresist with low-activation-energy ligands or high-developer-solubility ligands | Chen-Yu Liu, Ching-Yu Chang | 2025-01-28 |