Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360456 | EUV metallic resist performance enhancement via additives | An-Ren Zi, Ching-Yu Chang | 2025-07-15 |
| 12253800 | EUV metallic resist performance enhancement via additives | An-Ren Zi, Ching-Yu Chang | 2025-03-18 |
| 12210286 | Metal-compound-removing solvent and method in lithography | An-Ren Zi, Ching-Yu Chang | 2025-01-28 |