Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12275693 | Onium salt, chemically amplified resist composition and patterning process | Masayoshi Sagehashi, Takayuki Fujiwara, Masahiro Fukushima, Kazuhiro Katayama | 2025-04-15 |