Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12275693 | Onium salt, chemically amplified resist composition and patterning process | Masayoshi Sagehashi, Takayuki Fujiwara, Masahiro Fukushima, Masaki Ohashi | 2025-04-15 |
| 12216401 | Sulfonium salt, chemically amplified resist composition, and patterning process | Masahiro Fukushima | 2025-02-04 |