Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334370 | Apparatus and method for treating substrate | Sangmin Lee, Woo Young Kim, Boong Kim | 2025-06-17 |
| 12318819 | Exhaust assembly, and liquid processing apparatus and substrate processing equipment including the same | Kyung Min Kim, In Hwang Park, Hyun Jin Yang, Ji Hyeong Lee | 2025-06-03 |