Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12318819 | Exhaust assembly, and liquid processing apparatus and substrate processing equipment including the same | Kyung Min Kim, In Hwang Park, Joo Jib Park, Hyun Jin Yang | 2025-06-03 |