Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12358015 | Substrate processing apparatus and method of machining tubular guard | Takahiro Yamaguchi, Jun SAWASHIMA, Rikuta AOKI | 2025-07-15 |
| 12311414 | Substrate processing device and substrate processing method | Kenji Kawaguchi, Kota Tanikawa | 2025-05-27 |