Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417931 | Substrate processing apparatus and substrate processing method | Daijo MIZUKAMI, Tomoaki Aihara | 2025-09-16 |
| 12358015 | Substrate processing apparatus and method of machining tubular guard | Takahiro Yamaguchi, Jun SAWASHIMA, Toru Endo | 2025-07-15 |