Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322587 | Substrate drying apparatus and semiconductor device manufacturing method using same | Ji Hoon Jeong, Seo Hyun Kim, Sang-Jine Park, Kun-Tack Lee | 2025-06-03 |
| 12211716 | Substrate processing apparatus and substrate processing method | Jaeseong Lee, Kihoon Choi, Hae-Won Choi, Jihoon Jeong, Seohyun Kim +2 more | 2025-01-28 |
| 12198923 | Substrate processing method and substrate processing system | Hae-Won Choi, Anton Koriakin, Sangjine Park, Keonyoung Kim, Sukhoon Kim +3 more | 2025-01-14 |