Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334308 | Batch-type apparatus for atomic layer etching (ALE), and ALE method and semiconductor device manufacturing method based on the same apparatus | Hanjin Lim, Younsoo Kim, Jungmin Park, Hyungsuk Jung | 2025-06-17 |
| 12324145 | Semiconductor device with capping conductive layer on an electrode and method of fabricating the same | Chang-Su WOO, Haeryong KIM, Younsoo Kim, Jeonggyu SONG, Kyooho Jung | 2025-06-03 |