Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334308 | Batch-type apparatus for atomic layer etching (ALE), and ALE method and semiconductor device manufacturing method based on the same apparatus | Hanjin Lim, Younsoo Kim, Sunmin MOON, Jungmin Park | 2025-06-17 |
| 12336202 | Integrated circuit device | Intak Jeon, Hanjin Lim, Jaehyoung Choi | 2025-06-17 |