Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362200 | Supercritical fluid processing apparatus and substrate processing system including the same | Seohyun Kim, Ohchel Kwon, Sangwoo Kim, Youngchan Kim, Hyunchul Kim +5 more | 2025-07-15 |
| 12191190 | Substrate processing chamber, substrate processing system including the same, and substrate processing method using the same | Yongmyung Jun, Hyunjin Ko, Seohyun Kim, Jae Seong RYU, Inkwang BAE | 2025-01-07 |