Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191190 | Substrate processing chamber, substrate processing system including the same, and substrate processing method using the same | Yongmyung Jun, Hyunjin Ko, Seohyun Kim, Inkwang BAE, Seungbu BAEK | 2025-01-07 |