Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272535 | Spectroscopic analysis method, method for fabricating semiconductor device using the same, and substrate process system using the same | Doo Young Gwak, Tae Hyun Kim, Sang Ki Nam, Jae-Ho Jang, Jin Kyou Choi | 2025-04-08 |