Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272535 | Spectroscopic analysis method, method for fabricating semiconductor device using the same, and substrate process system using the same | Se Jin Oh, Doo Young Gwak, Tae Hyun Kim, Jae-Ho Jang, Jin Kyou Choi | 2025-04-08 |
| 12261021 | Apparatus and method for treating substrate | Hyun Bae Kim, Ji Hwan Kim, Hyong Seo YOON, Hyun Jae Lee, Myung Geun JEONG | 2025-03-25 |