Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368022 | RF generating device and semiconductor manufacturing apparatus including the same | Sungyong Lim, Sungyeol Kim, Yongwon Cho, Younghwan Choi, Chunyoon Park +2 more | 2025-07-22 |