Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340987 | Tunable plasma exclusion zone in semiconductor fabrication | Che-Wei Yang, Sheng-Chan Li, Cheng-Yuan Tsai, Sheng-Chau Chen | 2025-06-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340987 | Tunable plasma exclusion zone in semiconductor fabrication | Che-Wei Yang, Sheng-Chan Li, Cheng-Yuan Tsai, Sheng-Chau Chen | 2025-06-24 |