HH

Hiroyuki Higashi

TL Tokyo Electron Limited: 1 patents #256 of 785Top 35%
Overall (2025): #369,933 of 469,880Top 80%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12424459 Substrate processing apparatus and substrate processing method Hiroki Sakurai, Yenrui HSU, Shoki MIZUGUCHI, Nobuhiro Ogata, Shinichi Umeno +2 more 2025-09-23