Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424459 | Substrate processing apparatus and substrate processing method | Yenrui HSU, Shoki MIZUGUCHI, Nobuhiro Ogata, Shinichi Umeno, Kazuya Goda +2 more | 2025-09-23 |
| 12400882 | Substrate processing apparatus and substrate processing method | — | 2025-08-26 |