Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422743 | Method for measuring a reflectivity of an object for measurement light and metrology system for carrying out the method | Renzo Capelli, Markus Koch, Dirk Hellweg, Walter Pauls, Grizelda Kersteen | 2025-09-23 |
| 12372431 | Method for determining an imaging quality of an optical system when illuminated by illumination light within a pupil to be measured | Markus Koch, Renzo Capelli, Dmitry Simakov | 2025-07-29 |