Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422743 | Method for measuring a reflectivity of an object for measurement light and metrology system for carrying out the method | Renzo Capelli, Markus Koch, Walter Pauls, Grizelda Kersteen, Klaus Gwosch | 2025-09-23 |
| 12353141 | Method for heating an optical element in a microlithographic projection exposure apparatus and optical system | — | 2025-07-08 |