Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359311 | Conformal deposition of silicon carbide films using heterogeneous precursor interaction | Matthew Scott Weimer, Bhadri N. Varadarajan, Bo Gong | 2025-07-15 |
| 12331402 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more | 2025-06-17 |
| 12334332 | Remote plasma based deposition of silicon carbide films using silicon-containing and carbon-containing precursors | Bhadri N. Varadarajan, Matthew Scott Weimer, Galbokka Hewage Layan Savithra, Bo Gong | 2025-06-17 |
| 12272547 | Conformal deposition of silicon carbide films | Bhadri N. Varadarajan, Bo Gong | 2025-04-08 |