Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12302760 | Ion beam etching with sidewall cleaning | Ivan L. Berry, III | 2025-05-13 |
| 12280091 | Etch selectivity control in atomic layer etching | Andreas Fischer | 2025-04-22 |
| 12253190 | Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment | Mariusch Gregor, Theodoros Panagopoulos | 2025-03-18 |