Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12253190 | Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment | Theodoros Panagopoulos, Thorsten Lill | 2025-03-18 |
| 12215421 | Systems and methods for pulse width modulated dose control | — | 2025-02-04 |