Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360058 | Integration of an optical height sensor in mask inspection tools | Zefram Marks, Dmitry Skvortsov, Zhengyu Guo, Zhengcheng Lin, Rui-fang Shi | 2025-07-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360058 | Integration of an optical height sensor in mask inspection tools | Zefram Marks, Dmitry Skvortsov, Zhengyu Guo, Zhengcheng Lin, Rui-fang Shi | 2025-07-15 |