Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360058 | Integration of an optical height sensor in mask inspection tools | Zefram Marks, Zhengyu Guo, Zhengcheng Lin, Nicolas Steven Juliano, Rui-fang Shi | 2025-07-15 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360058 | Integration of an optical height sensor in mask inspection tools | Zefram Marks, Zhengyu Guo, Zhengcheng Lin, Nicolas Steven Juliano, Rui-fang Shi | 2025-07-15 |