Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372868 | Pattern forming method, kit, and resist composition | Tetsuya KAMIMURA | 2025-07-29 |
| 12343681 | Filter device, purification device, chemical solution production method | Tetsuya KAMIMURA, Tadashi Omatsu, Tetsuya Shimizu | 2025-07-01 |
| 12253801 | Solution, solution storage body, actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and manufacturing method of semiconductor device | Tetsuya KAMIMURA, Yukihisa Kawada | 2025-03-18 |