Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12311294 | Chemical liquid purification method and chemical liquid | Tetsuya KAMIMURA, Masahiro Yoshidome | 2025-05-27 |
| 12253801 | Solution, solution storage body, actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and manufacturing method of semiconductor device | Tetsuya KAMIMURA, Satomi Takahashi | 2025-03-18 |
| 12210287 | Resist pattern forming method and semiconductor chip manufacturing method | Tetsuya KAMIMURA, Masahiro Yoshidome | 2025-01-28 |