Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12277663 | Measurement processing device, method, and program | Tetsugo Matsuo, Nobuya Nishimoto, Shunji Sugaya, Syunsuke Naganuma, Keisuke Murata +3 more | 2025-04-15 |
| 12226936 | Substrate processing apparatus, substrate processing method, and article manufacturing method | Ken-ichiro Shinoda, Osamu Yasunobe | 2025-02-18 |