Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12226936 | Substrate processing apparatus, substrate processing method, and article manufacturing method | Hiroki Takada, Osamu Yasunobe | 2025-02-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12226936 | Substrate processing apparatus, substrate processing method, and article manufacturing method | Hiroki Takada, Osamu Yasunobe | 2025-02-18 |