MS

Masaki SUGIE

HH Hitachi High-Technologies: 1 patents #155 of 456Top 35%
Overall (2025): #287,171 of 469,880Top 65%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12354829 Overlay measurement system and overlay measurement device for overlay error measurement using electron microscopy Kei Sakai 2025-07-08