Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354829 | Overlay measurement system and overlay measurement device for overlay error measurement using electron microscopy | Masaki SUGIE | 2025-07-08 |
| 12347074 | Pattern measurement system, pattern measurement method, and program for measuring edge roughness at the edge of a pattern based on a random noise component | Toshimasa Kameda, Junichi Kakuta | 2025-07-01 |
| 12198327 | Measurement system, method for generating learning model to be used when performing image measurement of semiconductor including predetermined structure, and recording medium for storing program for causing computer to execute processing for generating learning model to be used when performing image measurement of semiconductor including predetermined structure | Ryou YUMIBA, Satoru Yamaguchi | 2025-01-14 |