Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387970 | Single wafer spin cleaning apparatus with soaking, cleaning, and etching functions | Hsiu-kai CHANG, Chin-yuan WU, Ming-Che Hsu | 2025-08-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387970 | Single wafer spin cleaning apparatus with soaking, cleaning, and etching functions | Hsiu-kai CHANG, Chin-yuan WU, Ming-Che Hsu | 2025-08-12 |