Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387970 | Single wafer spin cleaning apparatus with soaking, cleaning, and etching functions | Li-tso HUANG, Hsiu-kai CHANG, Chin-yuan WU | 2025-08-12 |
| 12251824 | Robot arm joint, connector and robot arm | SYUAN-JYUN WU | 2025-03-18 |