Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372875 | Composition for resist pattern metallization process | Wataru SHIBAYAMA, Satoshi Takeda, Shuhei Shigaki, Kodai KATO, Makoto Nakajima | 2025-07-29 |
| 12248251 | Silicon-containing resist underlayer film-forming composition including organic group having ammonium group | Wataru SHIBAYAMA, Hayato HATTORI, Makoto Nakajima | 2025-03-11 |
| 12227621 | Film-forming composition | Wataru SHIBAYAMA, Yuichi Goto, Shun KUBODERA, Satoshi Takeda, Makoto Nakajima | 2025-02-18 |