Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400881 | Apparatus and method of substrate edge cleaning and substrate carrier head gap cleaning | Jimin Zhang, Jianshe Tang, Brian J. Brown | 2025-08-26 |
| 12285838 | Wafer edge asymmetry correction using groove in polishing pad | Jimin Zhang, Jianshe Tang, Brian J. Brown, Priscilla Diep LaRosa | 2025-04-29 |