Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341314 | Conduit system, radiation source, lithographic apparatus, and methods thereof | Edward Siqi Luo, Andrew Jay Effenberger, Jr., Mohammad Amin Khamehchi | 2025-06-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341314 | Conduit system, radiation source, lithographic apparatus, and methods thereof | Edward Siqi Luo, Andrew Jay Effenberger, Jr., Mohammad Amin Khamehchi | 2025-06-24 |