Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341314 | Conduit system, radiation source, lithographic apparatus, and methods thereof | Edward Siqi Luo, Thomas D. Steiger, Andrew Jay Effenberger, Jr. | 2025-06-24 |
| 12245409 | Electromagnetic shield for a sealing mechanism of a laser chamber | — | 2025-03-04 |