TS

Tensei Sato

EB Ebara: 1 patents #42 of 118Top 40%
Overall (2025): #195,888 of 469,880Top 45%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12191178 Semiconductor manufacturing apparatus, failure prediction method for semiconductor manufacturing apparatus, and failure prediction program for semiconductor manufacturing apparatus Jumpei Fujikata, Yuji Araki, Ryuya Koizumi 2025-01-07