Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12271813 | Method for determining optimal number of submodules for use in semiconductor manufacturing apparatus including substrate processing module including plurality of submodules, and semiconductor manufacturing apparatus | — | 2025-04-08 |
| 12221714 | Plating method and plating apparatus | Masashi Shimoyama, Mizuki Nagai | 2025-02-11 |
| 12191178 | Semiconductor manufacturing apparatus, failure prediction method for semiconductor manufacturing apparatus, and failure prediction program for semiconductor manufacturing apparatus | Jumpei Fujikata, Yuji Araki, Tensei Sato | 2025-01-07 |