Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421600 | 2-in-1 (UV-assisted and plasma enhanced) ALD and ALE chamber | Jung-Hua Chang, CHING-LIANG YI | 2025-09-23 |
| 12403685 | Plate cooling device and de-bonding station with plate cooling device | Jung-Hua Chang | 2025-09-02 |
| 12224159 | Gas mixing method to enhance plasma | Chi Hung Cheng, Yao-Syuan Cheng, Kuo-Ju Liu, CHING-LIANG YI | 2025-02-11 |