Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230546 | Wafer registration and overlay measurement systems and related methods | Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Xiaosong Zhang, Jonathan D. Harms | 2025-02-18 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230546 | Wafer registration and overlay measurement systems and related methods | Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Xiaosong Zhang, Jonathan D. Harms | 2025-02-18 |