Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340979 | Semiconductor processing chamber for improved precursor flow | Tien Fak Tan, Dmitry Lubomirsky, Soonwook Jung, Raymond W. Lu, Phong Pham +1 more | 2025-06-24 |
| 12288675 | Cylindrical cavity with impedance shifting by irises in a power-supplying waveguide | Satoru Kobayashi, Hideo Sugai, Toan Q. Tran, Dmitry Lubomirsky | 2025-04-29 |