Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340979 | Semiconductor processing chamber for improved precursor flow | Tien Fak Tan, Dmitry Lubomirsky, Soonwook Jung, Soonam Park, Raymond W. Lu +1 more | 2025-06-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340979 | Semiconductor processing chamber for improved precursor flow | Tien Fak Tan, Dmitry Lubomirsky, Soonwook Jung, Soonam Park, Raymond W. Lu +1 more | 2025-06-24 |