Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362153 | Pedestal setup using camera wafer | Prasanna Kulkarni, Ted TAN, Vivekanandan Krishnaswamy, Boonyarit Woonprasert, Shawn Fiedler | 2025-07-15 |
| 12331402 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong, Will Schlosser +3 more | 2025-06-17 |