Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322571 | Multi-state RF pulsing to control mask shape and breaking selectivity versus process margin trade-off | Vikhram Vilasur Swaminathan, Beibei Jiang, Merrett Wong | 2025-06-03 |
| 12278112 | Multiple state pulsing for high aspect ratio etch | Aniruddha Joi, Merrett Wong, Eric A. Hudson, Jay Sheth | 2025-04-15 |
| 12217972 | Multi-state pulsing for achieving a balance between bow control and mask selectivity | Merrett Wong, Eric A. Hudson, Sangheon Lee, Xiaoqiang Yao | 2025-02-04 |