Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322571 | Multi-state RF pulsing to control mask shape and breaking selectivity versus process margin trade-off | Nikhil Dole, Vikhram Vilasur Swaminathan, Merrett Wong | 2025-06-03 |