Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359311 | Conformal deposition of silicon carbide films using heterogeneous precursor interaction | Bhadri N. Varadarajan, Bo Gong, Zhe Gui | 2025-07-15 |
| 12334332 | Remote plasma based deposition of silicon carbide films using silicon-containing and carbon-containing precursors | Bhadri N. Varadarajan, Galbokka Hewage Layan Savithra, Bo Gong, Zhe Gui | 2025-06-17 |