Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400885 | Modular multi-chamber processing tool having link chamber for ultra high vacuum processes | Robert Irwin Decottignies | 2025-08-26 |
| 12249494 | Remote plasma cleaning of chambers for electronics manufacturing systems | Yuanhong Guo, Sheng Guo, Steve Sansoni, Xiaoxiong Yuan, See-Eng Phan +3 more | 2025-03-11 |