Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400885 | Modular multi-chamber processing tool having link chamber for ultra high vacuum processes | Marek Radko | 2025-08-26 |
| 12232299 | Methods and apparatus for cooling a substrate support | Roger B. Fish, Steven Szudarski, Shane Lawrence Kintner | 2025-02-18 |